| Photon energy | 1486.61eV |
| Spectrum type | survey |
| Resolution | 150 |
| Lens Mode | SmallArea |
| Dwell Time | 0.1 |
| Step size | 0.5 |
| Number of scans | 1 |
| Photon energy | 1486.61eV |
| Spectrum type | O 1s |
| Resolution | 20 |
| Lens Mode | SmallArea |
| Dwell Time | 0.2 |
| Step size | 0.1 |
| Number of scans | 1 |
| Photon energy | 1486.61eV |
| Spectrum type | O 1s |
| Resolution | 20 |
| Lens Mode | SmallArea |
| Dwell Time | 1.9 |
| Step size | 0.1 |
| Number of scans | 1 |
| Photon energy | 1486.61eV |
| Spectrum type | survey |
| Resolution | 150 |
| Lens Mode | SmallArea |
| Dwell Time | 0.1 |
| Step size | 0.4 |
| Number of scans | 1 |