| Photon energy | 1486.61eV |
| Spectrum type | Pd 3d |
| Resolution | 20 |
| Lens Mode | ARM22 |
| Dwell Time | 0.1 |
| Step size | 0.1 |
| Number of scans | 1 |
| Photon energy | 1486.61eV |
| Spectrum type | Pd 3d |
| Resolution | 20 |
| Lens Mode | ARM22 |
| Dwell Time | 0.1 |
| Step size | 0.1 |
| Number of scans | 1 |
| Photon energy | 1486.61eV |
| Spectrum type | Pd 3d |
| Resolution | 20 |
| Lens Mode | ARM22 |
| Dwell Time | 0.1 |
| Step size | 0.1 |
| Number of scans | 1 |
| Photon energy | 1486.61eV |
| Spectrum type | Pd 3d |
| Resolution | 20 |
| Lens Mode | ARM22 |
| Dwell Time | 0.1 |
| Step size | 0.1 |
| Number of scans | 1 |